Technology
About how Beam Profile Reflectometry works and its advantages over comparable metrology and characterisation techniques
Beam Profile Reflectometry
Beam Profile Reflectometry (BPR) is a quantitative and non-destructive technique providing unparalleled accuracy in the ‘on’ and ‘off axis’ characterisation of coatings and membranes. BPR was first used in the early 1990s to characterise thin layers of material on semiconductor wafers. Since then n-eos has taken this base technology and through proprietary enhancements developed a range of metrology products that are helping redefine the measurement of thin layers, coatings and structures on curved or irregular-shaped surfaces.
Advantages of BPR
Compared to other thin film and coating metrology and characterisation techniques, BPR has a number of distinct advantages. These include: